STUDY OF ZRO2 FILM EVOLUTION BY SECONDARY-ION MASS-SPECTROMETRY

The formation of thermally prepared ZrO2 thin films on nickel and tita nium supports from a hydrated ZrOCl2 precursor was followed as a funct ion of the calcination temperature by secondary ion mass spectrometry, Concentration depth profiles of selected species (e.g. O-, Cl-, ZrO2- , C2H2-) were used to follow the process of film evolution, Although n o reaction between the coating and support takes place, the zirconia f ilms show differences in the distribution of main and trace components in the films as well as in the nature of the coating-support interfac e, The results are in agreement with those of former thermoanalytical and evolved gas analysis studies.