Diffusion-mediated nucleation and growth of islands during deposition
occurs essentially irreversibly in a variety of systems. We provide a
scaling theory for the full island-size distribution, both with the ra
tio of surface diffusion to deposition rates and with time. Scaling fu
nctions and exponents are determined by simulation and explained analy
tically by an unconventional rate-equation analysis. Experimental test
s for theoretical predictions are discussed, including the scaling of
superlattice beam profiles for diffraction studies of heteroepitaxial
systems.