SEM MEASUREMENT OF THE LINEAR DIMENSIONS OF RELIEF SUBMICRON STRUCTURES BY THE METHOD OF INVARIANT POINTS

Authors
DANILOV VA NOVIKOV YA RAKOV AV STEKOLIN IY
Citation
Va. Danilov et al., SEM MEASUREMENT OF THE LINEAR DIMENSIONS OF RELIEF SUBMICRON STRUCTURES BY THE METHOD OF INVARIANT POINTS, Measurement techniques, 38(8), 1995, pp. 876-879
Citations number
9
Categorie Soggetti
Instument & Instrumentation",Engineering
Journal title
Measurement techniques → ACNP
ISSN journal
05431972
Volume
38
Issue
8
Year of publication
1995
Pages
876 - 879
Database
ISI
SICI code
0543-1972(1995)38:8<876:SMOTLD>2.0.ZU;2-W
Abstract
The Monte Carlo method is used to simulate video signals from a scanni ng electron microscope in backscattered electrons from slit-like struc tures with a rectangular profile and widths of 0.1, 0.5, and 4.0 mu m.