MICROMACHINED SCANNING CONFOCAL OPTICAL MICROSCOPE

We have constructed a miniature confocal optical microscope for monoch romatic imaging that uses single-mode fiber illumination and a two-pha se off-axis zone plate objective lens. The scanning mechanism consists of two micromachined silicon torsional scanning mirrors with orthogon al axes of rotation. The objective lens is made of fused silica and ha s a N.A. of 0.24 at lambda = 0.6328 mu m, with a 1.0-mm working distan ce. The device is side looking, with die dimensions of 1.2 mm x 2.5 mm x 6.5 mm. We have measured 1.0-mu m resolution over a 100-mu m field of view. (C) 1996 Optical Society of America