CONTROL OF THE STOICHIOMETRY OF THIN-FILMS BY X-RAY-FLUORESCENCE ANALYSIS

Authors
TRUSHIN OS BOCHKAREV VF MUL VV NAUMOV VV
Citation
Os. Trushin et al., CONTROL OF THE STOICHIOMETRY OF THIN-FILMS BY X-RAY-FLUORESCENCE ANALYSIS, Industrial laboratory, 61(8), 1995, pp. 466-468
Citations number
10
Categorie Soggetti
Materials Science, Characterization & Testing","Instument & Instrumentation
Journal title
Industrial laboratory → ACNP
ISSN journal
00198447
Volume
61
Issue
8
Year of publication
1995
Pages
466 - 468
Database
ISI
SICI code
0019-8447(1995)61:8<466:COTSOT>2.0.ZU;2-J
Abstract
Simple, fast variants of methods for the determination of the stoichio metry of thin fi Lms by x-ray fluorescence spectroscopy based on a the oretical model of the primary spectrum of the x-ray tube and also cali bration by the external-standard method using standards on filter pape r are described, To ensure accuracy, analysis results were tested usin g specimens of known composition.