Amorphous Al DyF3-Al thin films are prepared using vacuum evaporation
at a pressure of 2.666 x 10(-3) Pa. The film thickness is measured usi
ng Tolansky's multiple beam interferometry technique. The effect of te
mperature (300 to 408 K) and frequency (1 to 71 kHz) on capacitance an
d loss tangent of these films is studied and the results are discussed
. Temperature coefficient of capacitance (TCC) and breakdown field str
ength for a particular film are estimated. The conduction mechanism in
these films is explained basing on the value of activation energy.