SILICON-NITRIDE GROWTH

Authors
Citation
A. Crunteanu, SILICON-NITRIDE GROWTH, Solid state technology, 39(5), 1996, pp. 20-20
Citations number
1
Categorie Soggetti
Engineering, Eletrical & Electronic","Physics, Applied","Physics, Condensed Matter
Journal title
ISSN journal
0038111X
Volume
39
Issue
5
Year of publication
1996
Pages
20 - 20
Database
ISI
SICI code
0038-111X(1996)39:5<20:SG>2.0.ZU;2-T