ABSORPTION-COEFFICIENTS OF SF6, SF4, SOF2 AND SO2F2 IN THE VACUUM-ULTRAVIOLET

Authors
PRADAYROL C CASANOVAS AM DEHARO I GUELFUCCI JP CASANOVAS J
Citation
C. Pradayrol et al., ABSORPTION-COEFFICIENTS OF SF6, SF4, SOF2 AND SO2F2 IN THE VACUUM-ULTRAVIOLET, Journal de physique. III, 6(5), 1996, pp. 603-612
Citations number
30
Categorie Soggetti
Material Science","Phsycs, Fluid & Plasmas","Physics, Applied
Journal title
Journal de physique. III → ACNP
ISSN journal
11554320
Volume
6
Issue
5
Year of publication
1996
Pages
603 - 612
Database
ISI
SICI code
1155-4320(1996)6:5<603:AOSSSA>2.0.ZU;2-7
Abstract
Absorption coefficients k(0)(m(-1) 100 kPa(-1)) of SF6 and of its main gaseous byproducts SF4, SOF2 and SO2F2 were measured in the VUV regio n. The experiments were carried out at a temperature of 298 K and a sp ectral resolution of 0.1 nm over the wavelength range 115 - 180 nm for SF6, 115 - 220 nm for SF4, 120 - 195 nm for SOF2 and 120 - 210 nm for SO2F2. The highest absorption coefficient values were obtained for SF 4 and the lowest for SF6.