NEW DIFFRACTIVE BEAM SHAPER GENERATED WITH THE AID OF E-BEAM LITHOGRAPHY

Authors
GOLUB MA DUPARRE M KLEY EB KOWARSCHIK R LUDGE B ROCKSTROH W FUCHS HJ
Citation
Ma. Golub et al., NEW DIFFRACTIVE BEAM SHAPER GENERATED WITH THE AID OF E-BEAM LITHOGRAPHY, Optical engineering, 35(5), 1996, pp. 1400-1406
Citations number
17
Categorie Soggetti
Optics
Journal title
Optical engineering → ACNP
ISSN journal
00913286
Volume
35
Issue
5
Year of publication
1996
Pages
1400 - 1406
Database
ISI
SICI code
0091-3286(1996)35:5<1400:NDBSGW>2.0.ZU;2-G
Abstract
A diffractive optical element has been fabricated which converts a Gau ssian CO2-laser beam into a flat-top rectangle. This was accomplished by enhanced photolithographic technology with e-beam generated masks. Experimental patterns of the shaped intensity for a single-mode CO2 la ser are presented. (C) 1996 Society of Photo-Optical instrumentation E ngineers.