PIEZOELECTRICALLY DRIVEN ROTARY STAGE FOR USE IN ULTRAHIGH-VACUUM

Authors
DEHAAS E BARSINGERHORN W VANDERVEEN JF
Citation
E. Dehaas et al., PIEZOELECTRICALLY DRIVEN ROTARY STAGE FOR USE IN ULTRAHIGH-VACUUM, Review of scientific instruments, 67(5), 1996, pp. 1930-1934
Citations number
8
Categorie Soggetti
Physics, Applied","Instument & Instrumentation
Journal title
Review of scientific instruments → ACNP
ISSN journal
00346748
Volume
67
Issue
5
Year of publication
1996
Pages
1930 - 1934
Database
ISI
SICI code
0034-6748(1996)67:5<1930:PDRSFU>2.0.ZU;2-E
Abstract
We have developed a compact high-precision rotary stage for use in ult rahigh vacuum. Its drive mechanism incorporates along its circumferenc e two sets of diametrically opposed piezoelectric devices with combine d clamping and pushing action. The maximum torque load is 0.7 Nm. The rotation is bidirectional over 360 degrees and proceeds in steps down to 1 mdeg at a maximum speed of one revolution per 2 min. (C) 1996 Ame rican Institute of Physics.