BLISTERS IN AS-DEPOSITED FILMS OF BCC STAINLESS-STEEL

Authors
EYMERY JP DENANOT MF
Citation
Jp. Eymery et Mf. Denanot, BLISTERS IN AS-DEPOSITED FILMS OF BCC STAINLESS-STEEL, Surface & coatings technology, 80(3), 1996, pp. 251-254
Citations number
12
Categorie Soggetti
Materials Science, Coatings & Films
Journal title
Surface & coatings technology → ACNP
ISSN journal
02578972
Volume
80
Issue
3
Year of publication
1996
Pages
251 - 254
Database
ISI
SICI code
0257-8972(1996)80:3<251:BIAFOB>2.0.ZU;2-X
Abstract
Spontaneous delamination of thin stainless steel films on Si{100} wafe rs is reported. The films were deposited using an ion beam technique a nd were 0.5 mu m thick with a residual compressive stress of 2.2 GPa. Analysis of blisters in spontaneously delaminated films using simple m odels gives a satisfactory estimate of the residual stress. The possib ility of utilizing the buckling patterns to determine the residual str ess state in stainless steel films on Si substrates is then evaluated.