PLANAR PHOTODIODES BASED ON P-HGCDTE (X=0.22) EPILAYERS GROWN BY MOLECULAR-BEAM EPITAXY

Citation
Vn. Ovsyuk et al., PLANAR PHOTODIODES BASED ON P-HGCDTE (X=0.22) EPILAYERS GROWN BY MOLECULAR-BEAM EPITAXY, Infrared physics & technology, 37(3), 1996, pp. 321-323
Citations number
7
Categorie Soggetti
Optics,"Physics, Applied
ISSN journal
13504495
Volume
37
Issue
3
Year of publication
1996
Pages
321 - 323
Database
ISI
SICI code
1350-4495(1996)37:3<321:PPBOP(>2.0.ZU;2-9
Abstract
This paper reports on the realization of small area long-wavelength in frared (LWIR) photodiodes based on CdHgTe films grown by molecular bea m epitaxy (MBE). The composition of the ternary compound is controlled in situ by a single-wave ellipsometer that offers the possibility to grow epilayers with a desirable composition profile across the film th ickness. Photodiodes have a vertical configuration and have been fabri cated using planar technology by annealing under an anodic oxide film.