Vn. Ovsyuk et al., PLANAR PHOTODIODES BASED ON P-HGCDTE (X=0.22) EPILAYERS GROWN BY MOLECULAR-BEAM EPITAXY, Infrared physics & technology, 37(3), 1996, pp. 321-323
This paper reports on the realization of small area long-wavelength in
frared (LWIR) photodiodes based on CdHgTe films grown by molecular bea
m epitaxy (MBE). The composition of the ternary compound is controlled
in situ by a single-wave ellipsometer that offers the possibility to
grow epilayers with a desirable composition profile across the film th
ickness. Photodiodes have a vertical configuration and have been fabri
cated using planar technology by annealing under an anodic oxide film.