OXIDATION MECHANISM INVOLVED IN THIN TIN FILMS

Tin in thin film form reaches its highest oxidation state SnO2 either through direct or indirect phase transformation. The direct or indirec t transformaion depends on whether SnO is in the alpha or beta phase, respectively. When SnO2 was reactively deposited, SnO2 films formed th rough a direct transformation exhibited high conductivity and optical transmission than those formed through an indirect phase transformatio n. It has been observed that a direct transformation helps to reduce t he substrate temperature required for the reactive deposition of SnO2.