Surface analysis can be defined as the direct measurement of the chemi
stry of the outer few atomic layers of a solid. The most commonly-used
techniques include Auger electron spectroscopy (AES), X-ray photoelec
tron spectroscopy (XPS) and secondary ion mass spectrometry (SIMS) alt
hough others provide complementary information and are used in more ex
tensive studies. The aforementioned techniques can be extended by the
use of depth profiling methods, to obtain information from beneath the
immediate surface, for example, to determine the thickness and compos
ition of overlayers. Surface analytical techniques can provide valuabl
e information in such areas of technology as semiconductors, packaging
, catalysis, coatings and metallurgy. In this short review, an introdu
ction will he given to the principles underlying AES, XPS and SIMS. Th
is is followed by a number of case studies which highlight how such te
chniques can elucidate a number of materials related problems.