A 3D FINITE-ELEMENT ANALYSIS COUPLED TO THE IMPEDANCE BOUNDARY-CONDITION FOR THE MAGNETODYNAMIC PROBLEM IN RADIOFREQUENCY PLASMA-DEVICES

In the metallic cooling system (cold crucible) of the radiofrequency ( rf) plasma devices, the penetration of flux is limited by skin effect. So, when analyzing the electromagnetic phenomena that appear in these devices, such metallic parts may be excluded from the region of solut ion by using the Impedance Boundary Condition (IBC). In this paper the coupling of the IBC to 3D finite element method, when using the magne tic vector potential A and the electric scalar potential V, is describ ed. This model has been applied to an rf plasma device study and valid ated by comparing the computed results with experimental data.