COPLANAR WAVE-GUIDES ON DIELECTRIC MEMBRANES MICROMACHINED ON A GAAS SUBSTRATE

Authors
SALZENSTEIN P DUPUIS O HELAL M LHEURETTE E VANBESIEN O MOUNAIX P LIPPENS D
Citation
P. Salzenstein et al., COPLANAR WAVE-GUIDES ON DIELECTRIC MEMBRANES MICROMACHINED ON A GAAS SUBSTRATE, Electronics Letters, 32(9), 1996, pp. 821-822
Citations number
6
Categorie Soggetti
Engineering, Eletrical & Electronic
Journal title
Electronics Letters → ACNP
ISSN journal
00135194
Volume
32
Issue
9
Year of publication
1996
Pages
821 - 822
Database
ISI
SICI code
0013-5194(1996)32:9<821:CWODMM>2.0.ZU;2-T
Abstract
GaAs micromachining technology was used for fabricating coplanar trans mission lines on Si3N4 and polyimide membranes deposited on GaAs subst rates. On-wafer measurements of scattering parameters up to 75GHz for several line configurations show a constant phase velocity of 2.9 10(8 ) m/s and a predominance of metallic losses with a square root frequen cy dependence.