A record wide continuous wavelength tuning range of 17.9nm is demonstr
ated in a vertical cavity surface emitting laser using a monolithic mi
cromachined deformable membrane top minor and operating singlemode nea
r 975nm. A 6.5mA threshold current and 26dB mode suppression ratio are
achieved, and tuning voltages for the micro-electromechanically movab
le mirror are below 20.5V.