Results are presented for anisotropic waveguides, with an arbitrary pe
rmittivity tensor, being diffused in both the transverse directions an
d by using the finite element method with the vector H-field formulati
on for the analysis. The importance of considering the waveguide core
dimensions to be greater than the diffusion depth in both the transver
se directions, the use of extrapolation techniques and of a symmetry p
lane for anisotropic waveguides are also discussed.