M. Horstmann et al., 16GHZ BANDWIDTH MSM PHOTODETECTOR AND 45 85GHZ F(T)/F(MAX) HEMT PREPARED ON AN IDENTICAL INGAAS/INP LAYER STRUCTURE/, Electronics Letters, 32(8), 1996, pp. 763-764
An MSM photodetector and a HEMT prepared on an identical InGaAs/InP la
ver structure are demonstrated for the first time. A 150nm undoped InG
aAs layer is inserted above the 2DEG to enhance the photodetector resp
onsivity, and a bandwidth of 16GHz is achieved. On the same wafer. pro
cessed HEMTs show optimal high frequency performance with an f(T) of 4
5GHz and an f(max) of 85GHz. This procedure could be suitable for the
preparation of monolithically integrated photoreceivers with high perf
ormance and low cost.