ELECTROOPTICAL CHARACTERISTICS OF INDIUM TIN OXIDE (ITO) FILMS - EFFECT OF THERMAL ANNEALING

Authors
MORGAN DV SALEHI A ALIYU YH BUNCE RW
Citation
Dv. Morgan et al., ELECTROOPTICAL CHARACTERISTICS OF INDIUM TIN OXIDE (ITO) FILMS - EFFECT OF THERMAL ANNEALING, Renewable energy, 7(2), 1996, pp. 205-208
Citations number
5
Categorie Soggetti
Energy & Fuels
Journal title
Renewable energy → ACNP
ISSN journal
09601481
Volume
7
Issue
2
Year of publication
1996
Pages
205 - 208
Database
ISI
SICI code
0960-1481(1996)7:2<205:ECOITO>2.0.ZU;2-M
Abstract
The effect of thermal annealing on the electrical and optical characte ristics of ITO films prepared by reactive sputtering and thermal evapo ration have been studied. The effect of the thermal annealing is to im prove the conductivity and the optical transmission in the shorter wav elength region. The conductivity of the films increases with annealing temperature, this behaviour is associated with grain growth in the fi lm. (C) 1996 Elsevier Science Ltd.