Ak. Holmer, SIMULTANEOUS MACHINING OF PARALLEL GROOVES IN SNO2 THIN-FILMS USING AND-YAG LASER AND A KINOFORM, Applied optics, 35(15), 1996, pp. 2614-2618
A kinoform is used to split the beam of a Nd:YAG laser into six beams.
The laser beams are, by means of optical fibers and collimating-focus
ing optics, transferred to the surface to be machined. Thus multiple g
rooves can be machined simultaneously. For demonstration, 100-mu m-wid
e grooves are simultaneously machined into a SnO2 thin film deposited
on a glass substrate. The resulting grooves are well isolated. This re
sult shows that the technique could be used, for example, in solar cel
l manufacturing to increase the efficiency of laser scribing.