P-TYPE DOPING OF DIAMOND FILMS WITH A NOVEL ORGANOBORON SOURCE

Authors
ZHANG XK GUO JG YAO YF WANG R CHEN GM ZHOU WK YU S
Citation
Xk. Zhang et al., P-TYPE DOPING OF DIAMOND FILMS WITH A NOVEL ORGANOBORON SOURCE, Applied physics. A, Solids and surfaces, 56(5), 1993, pp. 425-428
Citations number
11
Categorie Soggetti
Physics, Applied
Journal title
Applied physics. A, Solids and surfaces → ACNP
ISSN journal
07217250
Volume
56
Issue
5
Year of publication
1993
Pages
425 - 428
Database
ISI
SICI code
0721-7250(1993)56:5<425:PDODFW>2.0.ZU;2-9
Abstract
p-Type polycrystalline diamond films were prepared by hot-filament CVD method using a liquid cyclic organic borinate ester as the doping sou rce. The obtained films were identified as diamond films by means of S EM and Raman spectroscopy. The resistivity of the doped films can be a djusted by changing the temperature of the boron source.