The mechanism of the topotactic reaction of superconducting YBa2Cu3O7
thin films with water vapour is shown to be strongly influenced by the
reaction kinetics. At elevated temperatures a quasi-continuous transi
tion is observed while at lower temperatures a discontinuous transform
ation occurs with two phase regions and the appearance of a new superc
onducting metastable intermediate. The latter can be described as a se
cond stage compound. Models are discussed - based primarily on diffrac
tion and spectroscopic data - for the changes observed in structure an
d stoichiometry in order to understand the complex reaction mechanism
of this low temperature solid state process and the effects on the ele
ctronic properties of the thin layer material.