LASER-ASSISTED PHOTOELECTRIC OPTOGALVANIC ANALYSIS OF THIN-FILMS AND SURFACES USING A HOLLOW-CATHODE GLOW-DISCHARGE

Authors
DJULGEROVA R MIHAILOV V
Citation
R. Djulgerova et V. Mihailov, LASER-ASSISTED PHOTOELECTRIC OPTOGALVANIC ANALYSIS OF THIN-FILMS AND SURFACES USING A HOLLOW-CATHODE GLOW-DISCHARGE, Applied physics. B, Photophysics and laser chemistry, 56(5), 1993, pp. 301-305
Citations number
13
Categorie Soggetti
Physics, Applied
Journal title
Applied physics. B, Photophysics and laser chemistry → ACNP
ISSN journal
07217269
Volume
56
Issue
5
Year of publication
1993
Pages
301 - 305
Database
ISI
SICI code
0721-7269(1993)56:5<301:LPOAOT>2.0.ZU;2-M
Abstract
It is shown that substitution of the spectral line intensity with the photoelectric optogalvanic signal in the hollow-cathode glow discharge enhances the ability for layer-by-layer spectral analysis of surfaces and layers. In particular, this approach improves substantially the t hin-film thickness measurements and analysis accuracy.