ROBOT ASSISTED OPTICAL-EMISSION TOMOGRAPHY IN AN INDUCTIVELY-COUPLED PLASMA REACTOR

Authors
OKIGAWA A MAKABE T SHIBAGAKI T NAKANO N PETROVIC ZL KOGAWA T ITOH A
Citation
A. Okigawa et al., ROBOT ASSISTED OPTICAL-EMISSION TOMOGRAPHY IN AN INDUCTIVELY-COUPLED PLASMA REACTOR, JPN J A P 1, 35(3), 1996, pp. 1890-1893
Citations number
8
Categorie Soggetti
Physics, Applied
Journal title
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS → ACNP
Volume
35
Issue
3
Year of publication
1996
Pages
1890 - 1893
Database
ISI
SICI code
Abstract
The influence of external plasma parameters on the spatial profile of an inductively coupled plasma in Ar driven by a one-turn radiofrequenc y current coil at 13.56 MHz has been investigated by robot-assisted op tical emission tomography. The absolute value of the net excitation ra te to Ar(3p(5)) is discussed as functions of gas flow, gas pressure an d power dissipation.