Energetic, dynamic and kinetic reasons leading to the nonuniformity in
misfit dislocation (MD) distributions along the nanoscale layer inter
faces are considered. It is demonstrated that they are connected with
interactions occurring in the defect ensemble in the layer. The energe
tic approach is based on the analysis of the total energy density depe
ndence on the number of MDs in the MD row. The approach allows to find
critical parameters of a system (misfit strain and thickness of layer
) corresponding to the transition between the uniform and nonuniform M
D distributions. Analyzing the conditions for surface dislocation sour
ces initiation, the dynamic criterion is worked oat. In such a model M
D rows generate back stresses which lock the dislocation sources. A th
ree-element defect reaction-diffusion scheme is proposed for the analy
sis of dislocation kinetics in the nanoscale layers. It is assumed tha
t the defect ensemble consists of gliding, climbing and misfit disloca
tions. The existence of a critical layer thickness is predicted, above
which temporal oscillations in the defect densities appear.