The development of multilayer structures has been driven by a wide ran
ge of commercial applications requiring enhanced material behaviors. I
nnovations in physical vapor deposition technologies, in particular ma
gnetron sputtering, have enabled the synthesis of metallic-based struc
tures with nanoscaled layer dimensions as small as one-to-two monolaye
rs. Deposition process parameters effect the formation and stability o
f these small layer dimensions. Synthesis and characterization techniq
ues will be reviewed which emphasize experimental studies of mechanica
l properties in metallic multilayers at the nanoscale.