METALLIC MULTILAYERS AT THE NANOSCALE

The development of multilayer structures has been driven by a wide ran ge of commercial applications requiring enhanced material behaviors. I nnovations in physical vapor deposition technologies, in particular ma gnetron sputtering, have enabled the synthesis of metallic-based struc tures with nanoscaled layer dimensions as small as one-to-two monolaye rs. Deposition process parameters effect the formation and stability o f these small layer dimensions. Synthesis and characterization techniq ues will be reviewed which emphasize experimental studies of mechanica l properties in metallic multilayers at the nanoscale.