Nanoscaled Si-C-N powders are produced in a RF-induction plasma at atm
ospheric pressure. In all experiments the produced powders were soft a
nd fluffy. The products have been characterized by XPD and SEM combine
d with EDX. The size of the crystalline particles varies from 6 nm to
26 nm. The corresponding powders were obtained by reaction routes usin
g Si(CH3)(4) + NH3 and SiCl3CH3 + NH3 respectively. The crystalline Si
C doesn't form one of the numerous ordered polytypes. The smaller part
icles are completely disordered while the larger particles represent a
disordered cubic polytype.