NANOCRYSTALLINE SI-C-N COMPOSITES

Nanoscaled Si-C-N powders are produced in a RF-induction plasma at atm ospheric pressure. In all experiments the produced powders were soft a nd fluffy. The products have been characterized by XPD and SEM combine d with EDX. The size of the crystalline particles varies from 6 nm to 26 nm. The corresponding powders were obtained by reaction routes usin g Si(CH3)(4) + NH3 and SiCl3CH3 + NH3 respectively. The crystalline Si C doesn't form one of the numerous ordered polytypes. The smaller part icles are completely disordered while the larger particles represent a disordered cubic polytype.