In a Sc-doped 6H-SiC epitaxial layer on an n-type 6H-SiC substrate thr
ee new electron paramagnetic resonance (EPR) spectra were observed. Th
ey are explained as being due to the isolated Sc acceptor on the three
inequivalent sites in 6H-SiC having S = 1/2. The analysis of the EPR
spectra shows that Sc resides on carbon sites. The results are discuss
ed on the basis of selfconsistent calculations for Sc-Si in silicon.