FABRICATION OF HIGH-PACKING-DENSITY VERTICAL-CAVITY SURFACE-EMITTING LASER ARRAYS USING SELECTIVE OXIDATION

Authors
HUFFAKER DL GRAHAM LA DEPPE DG
Citation
Dl. Huffaker et al., FABRICATION OF HIGH-PACKING-DENSITY VERTICAL-CAVITY SURFACE-EMITTING LASER ARRAYS USING SELECTIVE OXIDATION, IEEE photonics technology letters, 8(5), 1996, pp. 596-598
Citations number
20
Categorie Soggetti
Optics,"Physics, Applied
Journal title
IEEE photonics technology letters → ACNP
ISSN journal
10411135
Volume
8
Issue
5
Year of publication
1996
Pages
596 - 598
Database
ISI
SICI code
1041-1135(1996)8:5<596:FOHVSL>2.0.ZU;2-F
Abstract
We describe the nearly-planar processing of two-dimensional vertical c avity laser arrays based on the selective conversion of AlAs to AlxOy. The individual lasers of 8 x 8 and 2 x 2 arrays are defined by native AlxOy to achieve 4-mu m square active regions on 12-mu m center-to-ce nter spacings, Interelement thermal coupling is characterized along wi th the optical mode structure.