Waveguide losses as low as 0.1 dB/cm at a wavelength of lambda = 1.3 m
u m have been achieved in SOI rib waveguides fabricated by wet chemica
l etching, The single-mode waveguides have a large cross section yield
ing field mismatch losses to a standard single-mode fiber of only 0.17
dB/facet (both polarizations), Polarization independent fiber-chip-fi
ber insertion losses of 0.9 dB (best 0.5 dB) at a chip length of 60 mm
have been measured.