The friction and wear properties of smooth diamond coatings sliding ag
ainst a monocrystalline ruby ball. were studied using a pin-on-disk tr
ibometer. The smooth diamond film surface was prepared either by (i) d
eposition of ultrathin nanocrystalline films in the thickness range fr
om 0.2 to 2 mu m or by (ii) postgrowth polishing. Excimer laser surfac
e ablation, microwave plasma etching and mechanical lapping with diamo
nd grit were used for postgrowth polishing. A correlation of film surf
ace properties examined with different techniques (atomic force micros
copy, Auger electron spectroscopy, Raman spectroscopy, stylus profilom
etry) and the tribological properties of the diamond films tested was
established. The influence of laser-induced surface graphitization on
the friction coefficient of laser-polished films was investigated.