SURFACTANT MODIFIED GROWTH OF CUINSE2 THIN-FILMS

A p-type film with resistivity as low as 0.05 Omega . cm and a mirror- like surface was obtained by the growth of the film in the presence of a Sb beam. The dramatic change in surface morphology is attributed to the layer-by-layer growth of the film. This film has a compact grain structure with grains about 1 mm in size, which is comparable with tha t of the Cu-rich film grown without Sb. A SIMS profile shows the segre gation of Sb on the surface and a trace amount of Sb in the film. We a lso find that the sticking probabilities of the constituent atoms are affected by the addition of Sb during film growth.