In order to deposit thin solid films containing covalently bonded carb
on nitride as a major matrix component, several different techniques f
or deposition were explored. They included reactive pulsed laser depos
ition, reactive DC magnetron sputtering and laser ablation of a frozen
ethanol/liquid N-2 double layer system. Surface analysis techniques s
howed that the concentrations of nitrogen were as high as 20 to 25 at%
in the bulk and up to 40 at% in the upper layers of the resulting a-C
/a-CNx films. The covalent bond of nitrogen to carbon was identified.
It is similar to the nitrogen bonds in silicon nitride and boron nitri
de.