A STEP TOWARDS NANOIONICS

The interaction of finely focused 20-100 kev electron beam at 10-1000 A/CM2 current densities with 30-150 nm films of the RbAg4I5-family sol id electrolytes has been studied. The results obtained show that it is possible to form arrays of electrochemical devices with single elemen ts approximately 10 nm in size in the films. Arrays of greater than or similar to 100 x 100 nm structures consisting of a solid electrolyte film on C-, Au- and Ag-thin supports are demonstrated.