EXTRACTION OF REAL-SPACE CORRELATION-FUNCTION OF A ROUGH-SURFACE BY LIGHT-SCATTERING USING DIODE-ARRAY DETECTORS

Based on an inverse transform method originally developed by Chandley and modified by us in the present work, we show that the height-height correlation function of a rough Si surface can be obtained directly f rom a single intensity distribution profile of light scattering. A nov el diode array detectors arrangement was used to obtain the intensity profile. The roughness parameters, including the interface width, late ral correlation length, and roughness exponent were extracted from the height-height correlation function and were compared with that obtain ed by an atomic force microscope. (C) 1996 American Institute of Physi cs.