M. Verhaegen et al., ION IMPLANTATION-INDUCED STRONG PHOTOSENSITIVITY IN HIGH-PURITY FUSED-SILICA - CORRELATION OF INDEX CHANGES WITH VUV COLOR-CENTERS, Applied physics letters, 68(22), 1996, pp. 3084-3086
We have studied optical changes induced by ArF (6.4 eV/193 nm) excimer
laser light illumination of high purity SiO2 implanted with Si2+ (5 M
eV) at a fluence of 10(15) ions/cm(2). Optical absorption was measured
from 3 eV (400 nm) to 8 eV (155 nm) and showed evidence of several we
ll-defined absorption bands. A correlation in the bleaching behavior a
ppears to exist between the so-called D band (located at 7.15 eV) and
the well-known B-2 alpha band which is attributed to oxygen vacancies.
Changes in the refractive index as a function of ArF illumination wer
e measured and found to be in good quantitative agreement with a Krame
rs-Kronig analysis of the optical absorption data. (C) 1996 American I
nstitute of Physics.