NOVEL PLASMA POLYMERIZATION SYSTEM USING A DC GLOW-DISCHARGE

Plasma polymerization using a direct current (d.c.) glow discharge was carried out using several organic compounds. We have developed a plas ma-polymerization instrument capable of using not only gaseous monomer s but also liquids and solids as the starting materials. The character istics of films prepared by d.c. glow discharge were examined by Fouri er transform infrared spectroscopy and Raman spectroscopies, electron spectroscopy for chemical analysis, and contact angle measurements. Th e chemical structures of the deposited films were greatly influenced b y the applied d.c. voltages during the discharge. Hydrogen-fret carbon films were prepared from plasma polymerization of both naphthalene an d benzene; the structure of these films, evaluated by Raman spectra, w ere quite different. Comparison of films deposited in different region s of the plasma, such as in the negative glow-phase region and in the positive column region, were performed. From these experiments similar film compositions were obtained.