MAGNETRON SPUTTERING FOR METAL-MATRIX COMPOSITE PROCESSING

A magnetron sputtering equipment for fibre coating with matrix and met al matrix composite (MMC) processing is described. For the matrix depo sition two pairs of magnetrons are used. The fibres are wound on a cyl indrical fibre holder, which rotates round the cylinder axis during ma trix deposition. The chemical concentration of the alloying elements i n the coating is in good agreement with that of the target material an d the oxygen pollution in the coating can in most cases be suppressed to a level lower than 1500 ppm. The deposition of gamma-TiAl with 2% C r and 2% Nb from targets made of pure metals is discussed.