SYNTHESIS AND CHARACTERIZATION OF POLYETHER ADDUCTS OF GROUP-2 METAL THIOACETATES - SINGLE-SOURCE PRECURSORS TO BINARY METAL SULFIDE FILMS,MS, WHERE M=CA, SR, BA
K. Kunze et al., SYNTHESIS AND CHARACTERIZATION OF POLYETHER ADDUCTS OF GROUP-2 METAL THIOACETATES - SINGLE-SOURCE PRECURSORS TO BINARY METAL SULFIDE FILMS,MS, WHERE M=CA, SR, BA, CHEMICAL VAPOR DEPOSITION, 2(3), 1996, pp. 105
New polyether adducts of group 2 thioacetate complexes for the formati
on of binary metal sulfides are described. The synthesis and character
ization of such precursors and their thermal reactivity to form the co
rresponding binary metal sulfides are briefly reported here. It is als
o shown that they can be used as single-source precursors for aerosol-
assisted CVD, as illustrated by the deposition of CaS from Ca(SOCMe)(2
) . 15-crown-5.