M. Nagai et al., LOW-PRESSURE THERMAL CVD SYNTHESIS OF TUN GSTEN NITRIDE THIN-FILM USING WCL6 AS TUNGSTEN SOURCE, Nippon kagaku kaishi, (4), 1996, pp. 368-374
The dependence of growth parameters (deposition temperature and gas co
mposition) on the deposition rate of tungsten nitrides on a qualtz sub
strate was studied by chemical vapor deposition (CVD) at temperatures
of 500 to 803 degrees C under total pressure of 0.12-0.17 kPa, total f
low rate of 60 ml/min in a gas mixture of WCl6-NH3-H-2 (in Ar). The me
chanism of the deposition of tungsten nitride film with time on stream
was also discussed. The tungsten nitride films were analyzed by scann
ing electron microscopy, X-Ray diffraction, and X-Ray photoelectron sp
ectroscopy. W2N (200) plane was preferably deposited for thickness of
0.5 mu m, but W2N (111) plane was mainly orientated above thickness of
1 mu m. The thin film was smoothly deposited about 500 degrees C and
has a fine structure without defects such as cracks and tearings. The
reaction orders for W2N deposition were 0.4, 0.3, and 0.3 with respect
to WCl6, NH3, and H-2, respectively.