A. Mahajan et al., HIGH-PERFORMANCE ENHANCEMENT-MODE HIGH-ELECTRON-MOBILITY TRANSISTORS (E-HEMTS) LATTICE-MATCHED TO INP, Electronics Letters, 32(11), 1996, pp. 1037-1038
The fabrication of 1.0 mu m gate length enhancement mode high electron
mobility transistors (E-HEMTs) in the lattice matched LnAlAs/InGaAs/I
nP material system is reported. Typical device DC chacteristics includ
e a threshold voltage of 275mV, transconductance of 650mS/mm, output c
onductance of 7.0mS/mm, and an off-state breakdown voltage of 16V. The
devices exhibited excellent RF performance with an f(t) of 35GHz and
an f(max) of 80GHz. For the first time, a process for E-HEMTs lattice
matched to InP suitable for circuit applications is presented.