P. Tandon et De. Rosner, CODEPOSITION ON HOT CVD SURFACES - PARTICLE DYNAMICS AND DEPOSIT ROUGHNESS INTERACTIONS, AIChE journal, 42(6), 1996, pp. 1673-1684
To capture in a tractable manner essential coupling effects in CVD sys
tems when particles generated in thermal boundary layers also deposit,
a film theory was developed that predicts simultaneous vapor and part
icle deposition rates at a hot deposition surface. The codeposition ra
te prediction method also calculates for the first time the correspond
ing solid deposit roughness using recently published results of partic
le-level simulations. For the numerical illustrations, the growth of T
iO2(s) films by the codeposition of titanium tetra-isopropoxide vapor
and film-nucleated/grown TiO2 particles (generated in the thermal boun
dary layer) was considered. Experimental rate data for this system are
available. The continuum and particle-level simulation methods provid
e: the interplay of vapor precursor kinetics, particle nucleation, gro
wth, coagulation and division in determining the complex ''structure''
of such multiphase chemically reacting boundary layers; wall depositi
on rates of both surviving vapors and film-nucleated particles; and th
e ''self-consistent'' microstructure (surface roughness) of the result
ing solid deposit timely and tractable generalizations are discussed i
n the light of recent results for the transport properties and stabili
ty of ''fractal-like'' aggregated particles.