CONTROL OF AN MPACVD REACTOR FOR POLYCRYSTALLINE TEXTURED DIAMOND FILMS SYNTHESIS - ROLE OF MICROWAVE-POWER DENSITY

We report here results concerning characterisations of polycrystalline textured diamond films with the purpose of determining the parameters responsible for the texture, growth rate and surface morphology. Beyo nd the influences of methane concentration and substrate temperature o n these characteristics, the influence of microwave power density (P-M W) is studied. An increase of both diamond film quality and growth rat e are observed as the P-MW increases. In addition, the role of nitroge n as impurities in CH4/H-2 gas mixtures is observed. The quality is ch aracterized by Raman spectroscopy, the morphology by SEM and optical g oniometry. The texture was investigated by X-ray diffraction analysis.