NONCLASSICAL MULTILAYER PERIODIC STRUCTURES BASED ON DLC FILMS

Properties a-C:H-I/a-C:H-II multilayer periodic structures and individ ual layers were studied by X-ray diffraction, ESCA, SIMS, optical and electrical measurements. It was shown that obtained multilayer structu res can be termed non-classical because they can be formed without cha nging the layer composition at the interface. The models of a-C and a- C:H layer structure were discussed. The experimental results obtained show that the structure of a-C and a-C:H films cannot be considered as cluster structures.