STRAIN PROFILES IN HE-IMPLANTED WAVE-GUIDE LAYERS OF LINBO3 CRYSTALS

Authors
ZOLOTOYABKO E AVRAHAMI Y SAUER W METZGER TH PEISL J
Citation
E. Zolotoyabko et al., STRAIN PROFILES IN HE-IMPLANTED WAVE-GUIDE LAYERS OF LINBO3 CRYSTALS, Materials letters, 27(1-2), 1996, pp. 17-20
Citations number
10
Categorie Soggetti
Material Science","Physics, Applied
Journal title
Materials letters → ACNP
ISSN journal
0167577X
Volume
27
Issue
1-2
Year of publication
1996
Pages
17 - 20
Database
ISI
SICI code
0167-577X(1996)27:1-2<17:SPIHWL>2.0.ZU;2-X
Abstract
He-implanted optical waveguides in Y-cut LiNbO3 wafers were studied by means of conventional high-resolution and grazing incidence X-ray dif fraction. The depth-resolved strain profiles were derived from the mea sured rocking curves, depending on the implantation dose. The obtained results demonstrated the high sensitivity of diffraction techniques t o the structural modifications in He-implanted LiNbO3 and allowed to s hed some light on the mechanism of the waveguide formation in damaged layers.