CAD MODELS FOR MULTILAYERED SUBSTRATE INTERDIGITAL CAPACITORS

Conformal mapping-based models are given far interdigital capacitors o n substrates with a thin superstrate and/or covering dielectric film, The models are useful for a wide range of dielectric constants and lay er thicknesses, Capacitors with finger numbers n greater than or equal to 2 are discussed, The linger widths and spacing between them may be different, The results are compared with the available data and some examples are given to demonstrate the potential of the models.