OPTICALLY ADDRESSED SPATIAL LIGHT-MODULATOR WITH HIGHLY SENSITIVE LAYER OF AMORPHOUS HYDROGENATED SILICON-CARBIDE

The photoaddressed spatial light modulator (PLSM) with thin hydrogenat ed amorphous silicon carbide photoreceptor alpha-Si1-xCx:H and nematic liquid crystal has been fabricated. The films were prepared by rf pla sma decomposition of SiH4 and CH4 gas mixture. They have a high dark r esistivity and photosensitivity as a hydrogenated amorphous silicon, b ut a more transmittance in visible spectrum. The maximum of diffractio n efficiency for PLSM was achieved for the write light intensity 40 mu W/cm(2), a resolution on the one half of maximum of diffraction effic iency was 54 mm(-1). The optical response of PLSM was observed in the frequency region from 1 Hz to 100 Hz.