The utility of employing a variable duty cycle pulsed plasma polymeriz
ation technique to control film chemistry during plasma depositions is
examined using allyl alcohol as monomer gas. Large scale progressive
variations in film composition are observed with sequential changes in
the plasma duty cycles employed, all other plasma variables being hel
d constant. In particular, the -OH functionality of the monomer is inc
reasingly retained in the plasma generated thin films as the radio fre
quency duty cycle is lowered. Fourier transform infrared and X-ray pho
toelectron spectroscopic analyses of the films obtained reveal that ex
cellent film chemistry control is achieved during plasma polymerizatio
n of this monomer. The surface density controllability of functional g
roups, coupled with a gradient layering technique described herein to
improve film adhesion to substrate surfaces, provides ideal opportunit
ies for molecular tailoring of surfaces via subsequent derivatization
reactions.