T. Kotaki et al., DEPOSITION OF DIAMOND FROM A PLASMA-JET WITH DICHLOROBENZENE AS CARBON SOURCE, Journal of the Electrochemical Society, 143(6), 1996, pp. 2003-2010
The diamond deposition on molybdenum substrate was examined in the Ar/
H-2 dc plasma jet adding dichlorobenzene as the carbon source compared
with adding benzene. Well-faceted, high quality diamond was formed on
the substrate when dichlorobenzene was used as the carbon source. Gra
phite or amorphous carbon was not observed on the surface of the depos
its by Raman spectroscopy, though the impurities were observed on the
surface of the deposits from the plasma jet with benzene as the carbon
source. A chlorine abstraction of surface-adsorbed hyhdrogen plays a
dominant role in activating the diamond surface, which thus gives rise
to higher diamond deposition rates and removal of graphite or amorpho
us carbon.